Domestic solar and LED production equipment will be unveiled in autumn China Electronics Fair, to promote the healthy development of China's green energy industry

Two LED and solar energy production equipment giant this year's two quarter earnings that will make people envy dark but very not the taste: Veeco Instruments 2010 second quarter revenue of $253 million, compared with the same period in 2009 increased by 251.4% in the second quarter of 2010; Aixtron's revenue amounted to 191 million 800 thousand euros, the annual increase of 238%. It is the flourishing development of solid-state lighting industry and renewable energy industry so that the two are located in the United States and German companies earn pours, Chinese related enterprises and capital in which can be described as "contribution" is a lot of, for example, the agency expects 2010 Aixtron and Veeco MOCVD will have more than 35% are sold Chinese. How to develop solar and LED production equipment of domestic, reduce the production cost, is the major propositions related to the healthy development of green energy industry Chinese. At present, the domestic solar photovoltaic equipment in the domestic users have established a good reputation, has been widely recognized in the industry, more and more customers benefit from the use of domestic equipment. Chinese photovoltaic equipment enterprises have basically has the whole line equipment of solar cell manufacturing, some products such as diffusion furnace, plasma etching machine started a small export, diffusion furnace, plasma etching machine, cleaning / texturing machine, quartz tube cleaning machine, low-temperature drying furnace) has occupied a dominant position in the domestic production line, PECVD, tube rapid sintering furnace and imported equipment coexist but share gradually increased, automatic screen printing machine, automatic sorting machine, flat PECVD is essential to rely on imports. Is participated in the seventy-sixth China Electronics Exhibition and Asian electronics exhibition (Shanghai) Qingdao Huaqi Technology Co. Ltd. is a professional semiconductor processing equipment and advanced materials research and development, equipment manufacturers, is committed to the semiconductor integrated circuit, semiconductor discrete devices, solar cells and LED lighting manufacturers to provide special equipment of advanced magnetic materials the process covers the compound semiconductor crystal growth and epitaxy, thin film deposition (silicon nitride, silicon oxide, silicon oxide, etc.) diffusion annealing (including rapid annealing) alloy, vacuum sintering. JDF200-3FS solar cell is the latest launch of the diffusion furnace can be used for 125mm solar cell production line, 156mm * 156mm * 125mm dimonds diffusion, oxidation and annealing process are as follows: the main characteristics and advantages of industrial computer control system, temperature, and boat, gas flow, gate movement automatic control the closed tube type; diffusion system, effectively reduce production costs, more clean, more environmentally friendly; the quartz boat with a soft landing sheet feeding, high reliability; the process of toxic gas collection and centralized processing of directional emission, more safety and environmental protection; it has a variety of technology for pipeline, users with flexible configuration; the power failure alarm over temperature alarm, over temperature alarm limit multiple safety protection function; the precision of temperature control, temperature control and good stability; the key parts all use Imported parts, high reliability, strong anti-jamming performance.

Figure 1: JDF200-3FS solar battery diffusion furnace Qingdao Huaqi technology company launched the latest.

Other exhibitors Qingdao sairuida Equipment Manufacturing Co. Ltd will also show low pressure chemical vapor deposition equipment, plasma enhanced chemical vapor deposition equipment and SRD-VGF furnace. The LPCVD is used to deposit thin films such as Poly-Si, Si3N4, SiO2, phosphor silicate glass, borosilicate glass, amorphous silicon and refractory metal silicide. The following main characteristics and advantages: the to achieve automatic control of the process of time, temperature, gas flow, the valve action, the pressure of the reactor; the imported pressure control system, closed-loop control, strong stability; the imported corrosion-resistant stainless steel pipe fittings, valves, ensure gas tightness; the alarm interlock device function and safety; the has good man-machine interface, flexible process performance. In LED lighting, China high-power characteristics of the substrate technology, processing stability and epitaxial efficiency rate compared with foreign countries, gradually narrowing the gap, but the extension of the upstream production equipment has been mainly rely on expensive imports of foreign products. MOCVD and other key equipment plays an important role in the development of LED industry, the relevant departments should have called for a person with breadth of vision Chinese concentration of talent and resources for development, to solve the key technology in manufacturing equipment, master the core technology with independent property rights, and the early realization of LED production equipment production. Only in this way will accelerate the development of LED industry, reduce the cost of LED related products, to achieve healthy and rapid development. Fortunately, soon in the domestic LED production equipment of the seventy-sixth China Electronics Show debut for the people lit the hope, to Qingdao Huaqi technology and Qingdao sairuida as the representative of a group of Chinese equipment manufacturers on the solar cell market at the same time, are the sights on the application of LED, LCD, power electronic devices etc. the market, and maintain the price advantage, and strive for greater market space in the new round of competition. They will become an important force to change the market structure of China and the world LED production equipment. Figure 2 is Qingdao Huaqi a technology extension and application of -LED/ crystal in compound semiconductor and semiconductor lighting research field of growth of MOCVD. The system is composed of growth chamber, gas source, gas control system, vacuum system, the computer control system etc. the system parameters can be automatically controlled by computer (WINDOW interface). The product can meet the requirements of "2" multi wafer, support GaN/GaAs and other thin film technology, using resistance heating / induction