China's first high-end LED etching machine delivery

Recently by ELEDETM330 ICP, high density plasma etching machine is the completion of the development of North microelectronics assembly debugging, formally delivered to customers. EledETM330 is a successful North Microelectronics Semiconductor Etching Technology in the field of LED expansion, the device's success on the line, marking the domestic LED etching equipment has been recognized by the mainstream production line, the high-end LED equipment in China domestic level of a new upgrade.

R & D and manufacturing North microelectronics has been committed to the high-end semiconductor process equipment. In 2009, with the help of the extensive experience in the field of semiconductor etching equipment, we developed a new design of inductively coupled high density plasma etching machine, which is specially designed for LED production. As our country's first direct to the LED production line of large capacity etching equipment, ELEDE 330 can meet the LED etching of sapphire substrate, Si substrate etching and GaN based epitaxial layer etching. ELEDE? 330 with a high capacity design is suitable for mass production, one can complete the 27 pieces of 2 inch GaN based epitaxial layer etching or 22 pieces of 2 inch sapphire substrate etching equipment, greatly improving the output efficiency; the central nozzle inlet system and IC level of the chamber surface treatment techniques such as system integration of high precision and high pressure high density plasma source, the life of the mechanical chuck, precise chamber temperature control system, the stability of the control system, the IC standard, the etching process of IC etching process with more sophisticated design requirements to achieve the LED field of higher performance, to greatly improve the luminous efficiency of LED chips.

Although there is a strong background of state-owned enterprises, but the North microelectronics is steadily walking in the market on the road. According to reports, the North microelectronics IC etching is being carried out 32nm technology research and development, efforts to catch up with the pace of the world. At the same time, relying on the accumulation of technology over the years, the North microelectronics in the field of PV and LED actively develop the market in addition to the product, so that the industry felt the internationalization of technology and the localization of the price and service charm.