OLED is the big time coming? Ace push large size equipment!

The new OVPD published the famous German semiconductor deposition equipment provider AIXTRON Ace Limited by Share Ltd before the display equipment OLAD (OrganicLarge Area Demonstrator, a large area of organic displays), that it has reached an important milepost in process technology. The system has been tested in-house over the past few months, and in some cases it has had a remarkable effect.

The goal of AIXTRON is to use the OLAD system to display customer related parameters in a production environment. Therefore, the proprietary core elements of the AIXTRON designed specifically for the OVPD process for Generation8.5 substrate size (2250mmx2250mm) expansion and optimization, and integrated into the process chamber with the corresponding size of the co production with Manz group, in. AIXTRON Ace also optimized its own source technology STExS (short thermal exposure source), in order to base on the size and requirements of the material, in the fast, the process of the material will be accurately measured into the gas.

Compared with the traditional evaporation (VTE, vacuum thermal), this technology can be started in a few seconds gasification, stop the operation after the completion of the substrate processing. At present, the deposition rate of 50 angstrom / S (a/sec) has been realized, the whole flow time is greatly shortened, and the consumption amount of material is reduced as far as possible.

In the OVPD process, the AIXTRON spray head technology also plays an important role. Different from the vacuum gasification VTE, this technology can promote the organic layer deposition based on regionalization. The material flow required in the OVPD process is supplied by the STExS source technology. STExS source with high deposition rate of 50a/sec, about 40 mg per second gasifiable. At the same time, patent design can ensure that sensitive and expensive organic materials can be handled in the process.

The company pointed out that before the test can be seen, the material utilization rate is far more than 70%, highly efficient. These results show that, compared to conventional gasification technology, the new process has made considerable progress, with a substantial reduction in the cost of production of OLED consistent goals. At present, the company has begun to show the relevant customers, and OLED manufacturers are able to use these new process technology, reduce production costs of OLED.

AIXTRON CEO Martin Goetzeler, said: our OLAD display device is currently demonstrated ability to achieve a significant interim achievement, help us achieve efficient OLED production. We are very pleased to be able to provide customers with the industry in this area of technology, but also once again that the company has the ability to turn complex technology into a successful product. "

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