A new type of harmful gas removal system for wet etching process

DAS Environmental Expert to create new value for the semiconductor industry: the new SALIX system can reduce the footprint and improve efficiency, thereby reducing the cost of removal

China Shanghai, July 15, 2013 - DAS in Dresden Germany Environmental Expert company is the semiconductor industry in the field of waste gas treatment and the world's leading enterprises in the R & D for new SALIX system. SALIX is a kind of harmful gas cleaning system, which is mainly used in wet etching cleaning platform. "We developed this system in response to the needs of our customers," said Dr. Davies Guy, director of DAS's Environmental waste gas processing business unit. Earlier, a large foundry industry wanted to find a solution to deal with the wet etching of the exhaust gas generated by the table. December 2012, DAS Environmental Expert installed the first set of systems, and has been running since January this year. Through the measurement of emissions, the results show that the system can fully meet the needs of customers, no trace of harmful substances need to be removed. "

SALIX

The semiconductor industry is also facing sustained competitive cost pressures

Because the agency is very focused on the use of resources in a responsible manner, on the other hand, more attention to the efficiency of the chip manufacturer, so the use of wet etching cleaning platform with the end of the process is the best solution. "There are at least 12 chambers in a wet etch cleaning table," said Davies. At present, the exhaust gas of each chamber still needs to be removed by means of a plurality of exhaust systems, which need to use complex conversion module to avoid the deposition in the pipeline. But the appearance of SALIX makes it impossible for us to use these bulky devices anymore. You only need to set up a SALIX system for each wet etching table, and a pipeline for conveying clean waste gas. In addition, compared to the previous SALIX technology area has been significantly reduced. "

The end clearance technique suitable for single wafer wet etching cleaning table, so far, has not yet been considered for the system with the use of DAS Environmental Expert terminal removal equipment, the company is the only use of the technology supplier at present. "This has changed," Davis said. We have received a number of U.S. customers inquiries. The industry's growing interest in SALIX is due to the far greater significance of saving resources than its cost".

SALIX can also reduce the cost of removal by reducing floor space and improving efficiency

In the wet etching and cleaning on the production of IC chip, wafer processing in accordance with the specific steps and the use of different cleaning solution in turn, this Davis explained: "including pure water, acid and alkaline chemical solvents, and volatile solvent. The wafers are then dried to make sure there is no residue. "

Davies said: "when cleaning 200 mm wafers, the entire cartridge needs to be immersed in solution. Chip manufacturers now rely on the so-called single crystal wafer cleaning process to clean 300 mm wafers. The process will be immersed in a single wafer cleaning solution, and in which the rapid rotation. Thanks to this rotation, the cleaning agent can be evenly distributed on the surface of the wafer, and finally thrown from the edge of the wafer, and through the system to collect the internal baffle. "

The exhaust gas from the wet etch cleaning table contains a certain proportion of the cleaning agent, whether in the form of vapor or liquid. In the past, these detergents have relied on extremely complex extraction systems. Davies said: "there are a number of such systems to separate and extract the acid, alkali and solvent waste gas, because only the separation of the suction, can effectively prevent the formation of fine particles in the pipeline and condensation phenomenon. "

SALIX uses chemical and physical adsorption of the two stage washing process to remove harmful substances directly from the gas stream at its source. With the help of a separate air outlet, the harmful gas enters the scrubber from the processing chamber of the wet etching cleaning table. From here, the exhaust gas enters the first stage of washing, followed by the second stage, and the use of completely different washing liquid. Without any technical or environmental threats, the rest of the clean air can be directly discharged into the air.

With the use of end removal technology, SALIX can effectively prevent the exhaust pipe blockage. The system does not require any dilution air, so carefully prepared clean air will remain in the room, in order to further reduce costs.

Company profile

DAS Environmental Expert is an environmental technology company headquartered in Dresden, germany. DAS was founded in 1991, is the world's leading supplier of process gas processing technology and equipment solutions. DAS technology has been widely used in the semiconductor, TFT-LCD, electronics industry and solar industry, many of the leading international companies. The company also has a business unit dedicated to the development of industrial and public waste water treatment and system solutions. DAS Environmental Expert business all over the world, currently has 230 employees in recent years, the annual sales of up to 21 million euros.