Microelectronics optoelectronic equipment to maintain steady development

As the backbone of China's semiconductor equipment enterprises, China Electronics Technology Group 48 Where the national high-end integrated circuit core ion implantation equipment R & D and production machines at the same time, timely grasp of China's PV industry formation and development opportunity, for the past three years in the solar cell industry and integrated circuit industry provides semiconductor equipment worth nearly 500 million yuan. 2007 is expected to be on the basis of nearly two years of continuous production and economies of scale on the basis of more than 50% growth over the same period, of which only semiconductor equipment sales will reach $300 million for the first time.

A semiconductor device 48 production there are two major categories, one is the microelectronic and optoelectronic devices, mainly used in integrated circuits, discrete devices, power electronics, LED and other industries; one is the solar cell manufacturing equipment and materials, mainly used in solar cell manufacturing, silicon material processing etc.. 2007, 48 microelectronics and optoelectronic devices to maintain a steady growth rate of development, some of the core equipment, such as ion implanter and other large-scale production line and exported overseas, MOCVD, CMP and other production technology to make a breakthrough.

Has obvious characteristics of manufacture of compound growth of IC industry, optoelectronics industry and photovoltaic industry development in the next ten years in China will still maintain a high rate of. Integrated circuit process equipment, LED equipment and solar cells and materials manufacturing equipment will continue to be the main development direction of the 48. We will be on the basis of the existing equipment research: high-end ion with integrated circuit industry 12 inch width less than 90nm injection machine, film flattening device, vertical diffusion oxidation furnace, CMP; production MOCVD blue LED manufacturing field; the field of solar photovoltaic cell manufacturing equipment such as a series of new environmental protection of large caliber diffusion / oxidation furnace, tube PEC, VD ultra fast burning furnace; silicon material processing equipment such as single crystal furnace and large capacity furnace polysilicon ingot.

Source: Sina