STS MEMS wafer deep etch machine strives for Bosch orders

Electric Technology (Surface Technology slurry process STS Systems PLC) recently announced that the company's new generation Pegasus wafer deep etching machine (DRIE) has been fighting for the German automation microelectromechanical system (MEMS) equipment manufacturing giant BOSCH (Robert Gosch GmbH) order.

This is Pegasus since June 28, 2005, first published, fifth important orders received by. The Pegasus system will be installed in the Bosch in Germany where forest root (Reutlingen) fabs, the future will be used for a number of research and development plan, the development of new MEMS equipment.

According to the introduction, the STS software system with high flexibility, can be manually controlled, let Bosch maker can completely upgrade the individual process performance, to ensure product quality and high yield. In the MEMS market, equipment design often varies significantly with different manufacturers. STS believes that the company's equipment sufficient to meet the diverse needs of our customers. Except Pegasus technology can provide the advantages of this process, STS won another major Bosch STS is favored, adhere to and the commitment to provide outstanding customer support and service in germany. Earlier this year, STS reorganized and strengthened its working team in the German office in Ulm (Ulm) and assigned a regional customer support coordinator to lead the team. The new director will work closely with clients in germany.

STS vice chairman Mutsuo Mukuda said: "Bosch this Pegasus system order is vital to us. This order not only represents one of the most important and largest customers in Europe, we adopted the Pegasus system, but also strengthened our confidence in Pegasus. Pegasus brings the strengthening and development of technology level for the MEMS market, such as high uniformity of the plasma source, can help improve the etching rate higher, and greatly improve the etching uniformity, create a higher transfer rate and yield rate of equipment. We look forward to the Pegasus, I hope this system can further promote the vigorous development of the MEMS market."