The breakthrough of industrialization of large diameter silicon materials in China

According to the national development and Reform Commission website reported that at present, China's large diameter semiconductor silicon materials industry has made new progress, Beijing Nonferrous Metal Research Institute, National Semiconductor Materials Engineering Research Center and the research of semiconductor materials Limited by Share Ltd captured 0.13-0.10 micron integrated circuit with a diameter of 12 inches polished monocrystalline silicon project complete technology, the current month 10 thousand pilot production line products, has made the user trial and delivery assessment.

Polished single crystal silicon wafer is an important basic material of the semiconductor industry. At present, the diameter of 12 inch silicon wafers in a period of rapid development, by the end of 2005, the whole world has completed 46 12 inch integrated circuit wafer production line, annual demand amounted to more than 14 million, China is expected to "11th Five-Year" during the annual demand of 12 inch diameter polished single crystal silicon wafer will reach 120-240 million tablets.

"95", "fifteen" period, in the relevant national plans under the support of the Beijing Nonferrous Metal Research Institute at the international technology development, adhere to independent innovation, to complete the construction of the National Engineering Research Center of semiconductor materials at the same time, focus on growth, wafer processing, wafer testing and other aspects of analysis of large diameter silicon single crystal development a large number of technical research, breakthrough of large diameter silicon single crystal growth and wafer processing engineering complete technology, and formed a professional engaged in silicon material production and technology development capabilities. The diameter of 12 inch polished monocrystalline silicon project complete technology has a pilot production line and built to meet China's "11th Five-Year" high-end integrated circuit industry needs, provides a solution for the further development of 12 inch diameter polished single crystal silicon wafer scale industry, will have a very positive effect on the development of China's high tech industry.