Entegris push 12 inch wafer transfer device mask processor

Semiconductor material clean, protection and transmission supplier Entegris, in 2006 Taiwan semiconductor equipment and Materials Exhibition (SEMICON Taiwan) published three advanced products, including 300mmFOSB (12 inch wafer box), Spectra FOUP (12 inch wafer transfer box) and RSP 200 PEEK processor mask.

With 300mm wafer processing countryunceasingly to automatic transmission trend, Entegris FOSB contains can help customers achieve process consistency and cost saving technology. Entegris FOSB with FIMS compatible door, so that the factory can be more efficient to achieve automatic production environment.

Spectra is using 300mm wafer transfer technology, to help customers into the advanced 90nm technology. It is compatible with all production machines and automation equipment, and can achieve the best production efficiency. The Spectra FOUP has a proven design that protects the wafer from contamination by particulates, air borne molecules, and prevents the impact and vibration of the chip to ensure a higher yield. In addition, the device is equipped with advanced ESD grounding, and supports a variety of identification methods.

Entegris said, higher standards of cleanliness (particle level and molecular level) prompted the design used in the manufacture of products during transportation and storage to improve the performance of the mask. The company's RSP 200 PEEK processor in the mask mask transport, can protect the body by the transport processor loading port and the storage area of PEEK material, improved the anti wear performance, and in the main body and provided between the efficient sealing efficiency, reduces the air, ESD provides better protection, so as to realize the overall pollution better control, reduce the damage and improve the yield of mask.

With previous products in wear performance of RSP 200 PEEK is increased by 12 times, the sealing efficiency increased by 50 times and 1500 times the air dropped. Its interior is 18% smaller than the previous one, thus making it less necessary to control pollution. Now the product can be ordered and shipped.