The introduction of digestion and absorption and innovation to increase the intensity of the development of mass production MOCVD equipment

The "opinions" the development of semiconductor lighting industry has proposed to improve the capability of independent innovation, to achieve large-scale MOCVD of domestic equipment, through the introduction of absorption and innovation, focus on joint parties to capture the core technology MOCVD equipment etc.. So what are the difficulties in the development of equipment in China? Now what level? The future and how to do?

"Extension and equipment is the lifeblood of the whole industry chain, determines the development of the industry as a whole. The general manager of Blaupunkt Shanghai Li Gang spoke at a meeting when the extremely elegant and valuable. However, this is a matter of the core of the industrial development of the core equipment MOCVD (metal organic chemical vapor deposition equipment), so far China is still in a state of total dependence on imports.

To change this situation, improve China's localization of key equipment, the 6 ministries jointly issued the "opinions" of the development of semiconductor lighting industry also has proposed to improve the capability of independent innovation, to achieve large-scale MOCVD of domestic equipment, through the introduction of digestion and absorption and innovation, focus on joint parties to capture the core technology of MOCVD equipment etc..

Development of domestic equipment is imperative

MOCVD is the key equipment for the fabrication of GaN based light-emitting diodes and laser epitaxial wafers, and is also the main equipment for the preparation of optoelectronic materials such as gallium arsenide and indium phosphide. At present, MOCVD equipment manufacturers in Germany AIXTRON company (Germany Ace company) and VEECO company (Mei Guowei ekey Precision Instrument Co. Ltd.) production MOCVD equipment accounted for almost 90% of global market share, the production of MOCVD equipment in China is completely dependent on imports of the state. China's semiconductor lighting industry in order to have pricing power in the world, the right to speak, but also the rapid breakthrough in the field of high-end equipment, etc.. Shanghai blue Liu Wendi said in an interview with reporters. Preparation of materials is closely related with the MOCVD device, "curing LED epitaxial preparation on MOCVD, become the core material preparation, if China does not have the ability to create MOCVD, which will affect the production of epitaxial materials in China to a great extent. An industry analyst said. Now, in addition to a handful of Japanese companies have the ability to grow and expand their own MOCVD equipment through the expansion of external capacity, China and Taiwan, South Korea, the extension of enterprises are basically purchasing standard MOCVD equipment.

Because a lot of chip enterprises procurement is the standard MOCVD equipment, epitaxial materials and chip technology is also the same, which makes a lot of chip companies into a homogenization. "Industry experts said that at present in the world, high quality epitaxial wafer used for efficient lighting is usually achieved through the transformation of standard equipment and technology talents, so our country should have the transformation of MOCVD equipment, at the same time, it is also for our manufacturing equipment MOCVD foundation.

In addition, the high price of semiconductor lighting products has been recognized as one of the bottlenecks restricting the scale of the industry, according to statistics, in the epitaxial chip production costs, MOCVD equipment depreciation and power of about 13%. High cost of equipment is one of the key factors to prevent the decline in product prices. "Chip prices high, the competition ability of enterprises in our country is not strong, the profit space narrowing, such as the use of domestic equipment, to reduce production cost to a great extent. Industry experts said that the high price of foreign manufacturers of MOCVD equipment, a key factor restricting the cost of semiconductor lighting products in China fell.

The foreign market monopoly of MOCVD equipment has seriously restricted and affected the healthy development of China's semiconductor lighting industry. At present, the mainstream of the international MOCVD industry equipment has been developed from the initial 3 machines to the current 42, 45, 49 machines, the speed of technology update is accelerating. China's R & D is still far behind the pace of foreign development. "Foreign companies on the market has seriously affected the enthusiasm of domestic enterprises in the development of MOCVD devices, coupled with foreign technology development, equipment replacement fast, under the dual pressure of domestic equipment is very difficult to open the market, restrict the development of China's domestic equipment. Industry expert Professor Xu Xiangang said.

China has the ability to develop MOCVD equipment

MOCVD equipment industry chain spire is the industry recognized the most difficult part of the research process. The "opinions" also put forward a clear goal, pointed out that "in 2015, the independent innovation ability of semiconductor lighting enterprises in China increased, large MOCVD equipment, key raw materials and more than 70% of the chip to achieve localization, the upstream chip scale production enterprises from 3 to 5. "Industry analysts pointed out that the development and production of domestic MOCVD equipment, improve the localization rate of MOCVD equipment, can not only meet the increasing market demand, but also can reduce the development of LED industry investment threshold, the objective to promote the development of the LED industry.

But MOCVD equipment is a set of semiconductor materials, fluid mechanics, chemistry, machinery, vacuum, circuit and automatic control and other disciplines in one of the major projects, the need for multi-disciplinary technical personnel collaborative research. As early as in the 95, the "fifteen" plan in to arrange the MOCVD R & D projects, in the "863" plan in 11th Five-Year, and the localization of MOCVD equipment included in the direction of key support. Under the support of national policy, China has achieved initial success in the localization of MOCVD equipment: the forty-eighth Research Institute of China Electronic Technology Group Corporation jointly with Nanchang University, through digestion and absorption and re innovation of key technology measures, successfully developed a growth of 6 pieces of GaN production equipment MOCVD 2 inches, but